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Brief description：1400°C Tube Furnace Chemical Vapor Deposition (CVD) refers to the method of chemical gas or steam reacting on the surface of the substrate to synthesize coatings or nanomaterials. It is the most widely used technology in the semiconductor industry to depo
Model：TF1400 ℃ CVDManufacturer：CHISHUN TECHUpdate time：2023-05-23Visits：469TEL：+86 25-86795086 58000618
Skype：+86 139 1299 5166
Mobile：+86 139 1299 5166
E-mail：admin@nj-keyscience.com
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Furnace shell
The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion.
The solid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low
Horizontal use mode, upper opening structure, easy to operate
Refractory material
Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption
Heating system
High-quality SIC spiral resistance wire heating element is safely and firmly embedded on the surface of the furnace, and is heated by free heat radiation in the furnace cavity, which is energy-saving and efficient, and has a long service life
Ring heating by resistance wire to achieve good uniformity in the furnace
Temperature Control Panel
PID and SSR control mode, precise temperature control
Internationally standardized S-type nickel-chromium-silicon thermocouple with a temperature measurement range of 0-1400℃ and a long service life
The furnace door is equipped with a door-opening power-off safety protection switch
Program Controller
Advanced controllers that meet complex process requirements
Simple and direct operation, flexible programming
Programmable 4 curves, 8 program segments for a single curve
Over temperature and fault alarm, automatic safety protection
Vacuum Atmosphere Function
With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube
High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions
The high-performance bipolar rotary vane vacuum pump can obtain a vacuum degree of 5pa, and the digital vacuum gauge can display the vacuum degree
With air circuit control unit, the control unit can choose 1-3 way MFC automatic control system
Technical Parameter
|
Item |
TF1400-25 |
TF1400-40 |
TF1400-60 |
TF1400-80 |
TF1400-100 |
TF1400-120 |
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Tube Size |
Φ25x800mm |
Φ40x1000mm |
Φ60x1000mm |
Φ80x1000mm |
Φ100x1000mm |
Φ120x1000mm |
|
Max Temperature |
1400℃ |
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Work Temperature |
1300℃ |
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Heating Zone |
440mm |
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Voltage/Power |
220V/2KW |
220V/2KW |
220V/3KW |
220V/4KW |
220V/5KW |
220V/5KW |
|
Heating Element |
Silicon Carbide Rod（SIC）Heater |
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Chamber Material |
Polycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration |
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Tube Material |
Alumina Tube |
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Temperature Accuracy |
±1℃ |
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Thermocouple |
S type thermocuple |
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Temperature Controller |
Intelligent microcomputer PID temperature control instrument, SCR/SSR control, PID parameter self-tuning function; programmable 4 groups of 8 program segments, program heating, program heat preservation, program cooling |
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Heating Rate |
1-25℃/min freely set |
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Furnace Structure |
Furnace temperature control integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation |
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Sealing Function |
Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤5pa (rotary vane vacuum pump) |
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Atmosphere Performance |
There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen. |
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Equipment Safety |
Modular control, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically |
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Safety Protection |
The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators |
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Furnace Shell |
High-quality cold-rolled steel plate CNC machine tool blanking processing, after welding, grinding, polishing, phosphating, pickling, surface electrostatic spraying plastic powder |
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Quality Certificate |
ISO9001 CE SGS TUV |
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Standard Accessroies |
1. Furnace Body 2. Temperature Controller 3. Power Cable 3 meters 4.Thermocouple 5.Manual 6. Furnace Hook 7. One pair of high temperature gloves 8. Two pipe plugs 9. One set of sealing flange |
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Optional Accessories |
1. Optional rotary vane vacuum pump (vacuum degree ≤ 5pa 2. Optional digital vacuum gauge (1.0×105-1.0×10-1pa) 3. Optional float flowmeter (range 60-600ml/min) 4. Optional with quartz boat |
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